Suppressed Gate Leakage Current and Enhanced Gate Dielectric Reliability in FinFET

碩士 === 國立清華大學 === 工程與系統科學系 === 107

Bibliographic Details
Main Authors:	Chen, Huang-Jen, 陳皇任
Other Authors:	ChangLiao, Kuei-Shu
Format:	Others
Language:	zh-TW
Published:	2018
Online Access:	http://ndltd.ncl.edu.tw/handle/wub55j

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spelling	ndltd-TW-107NTHU55930072019-05-16T01:08:04Z http://ndltd.ncl.edu.tw/handle/wub55j Suppressed Gate Leakage Current and Enhanced Gate Dielectric Reliability in FinFET 鰭式電晶體之抑制閘極漏電流與提升閘極介電層可靠度研究 Chen, Huang-Jen 陳皇任碩士國立清華大學工程與系統科學系 107 ChangLiao, Kuei-Shu 張廖貴術 2018 學位論文 ; thesis 80 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 工程與系統科學系 === 107
author2	ChangLiao, Kuei-Shu
author_facet	ChangLiao, Kuei-Shu Chen, Huang-Jen 陳皇任
author	Chen, Huang-Jen 陳皇任
spellingShingle	Chen, Huang-Jen 陳皇任 Suppressed Gate Leakage Current and Enhanced Gate Dielectric Reliability in FinFET
author_sort	Chen, Huang-Jen
title	Suppressed Gate Leakage Current and Enhanced Gate Dielectric Reliability in FinFET
title_short	Suppressed Gate Leakage Current and Enhanced Gate Dielectric Reliability in FinFET
title_full	Suppressed Gate Leakage Current and Enhanced Gate Dielectric Reliability in FinFET
title_fullStr	Suppressed Gate Leakage Current and Enhanced Gate Dielectric Reliability in FinFET
title_full_unstemmed	Suppressed Gate Leakage Current and Enhanced Gate Dielectric Reliability in FinFET
title_sort	suppressed gate leakage current and enhanced gate dielectric reliability in finfet
publishDate	2018
url	http://ndltd.ncl.edu.tw/handle/wub55j
work_keys_str_mv	AT chenhuangjen suppressedgateleakagecurrentandenhancedgatedielectricreliabilityinfinfet AT chénhuángrèn suppressedgateleakagecurrentandenhancedgatedielectricreliabilityinfinfet AT chenhuangjen qíshìdiànjīngtǐzhīyìzhìzhájílòudiànliúyǔtíshēngzhájíjièdiàncéngkěkàodùyánjiū AT chénhuángrèn qíshìdiànjīngtǐzhīyìzhìzhájílòudiànliúyǔtíshēngzhájíjièdiàncéngkěkàodùyánjiū
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Suppressed Gate Leakage Current and Enhanced Gate Dielectric Reliability in FinFET

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