| Summary: | 博士 === 國立清華大學 === 動力機械工程學系 === 107 === Due to their low cost, bendable and stretchable characteristics, flexible tactile sensors are widely used in touch panel, prostheses, robots, and artificial electronic skin (e-skin) to mimic the sensing capabilities of human skin.
In this thesis, two kinds of novel flexible tactile sensors with different sensing mechanisms, piezoresistivity and capacitance, are developed. In the first part, the proposed piezoresistive tactile sensor is investigated. It utilizes the interlocked structures with high-aspect-ratio ZnO nanorod arrays to increase the available conducting paths and thus to increase the contact areas for electrical conduction between two electrodes. As a result, the sensitivity is significantly improved. To become a multifunctional tactile sensor, except for measuring the static and dynamic forces, the developed tactile sensor can be employed to detect the environmental temperature using the characteristics of the thermal resistance of ZnO nanorods. Furthermore, with 3 × 3 sensor units, the piezoresistive tactile sensor can provide high resolution and identify the difference in the strengths of multiple-touch forces applied. In the second part, a novel capacitive tactile sensor has been proposed. The perceptive unit of tactile sensor consists of five sensing electrodes to detect three-axial force. Each capacitive sensing unit comprises a pair of the same shape but different size electrodes (top electrode and bottom electrode). By the unique design of electrode shapes, the developed tactile sensor is able to detect the applied normal force and the shear force, to have the capability of decoupling the applied normal and shear force and the torsion sensing. In the future, the proposed tactile sensor with the ability of sensing torque can be utilized in the wearable devices, flexible interface in the touch panel, and bionic robotic skins.
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