| Summary: | 碩士 === 國立清華大學 === 動力機械工程學系 === 107 === To evaluate the pattern transfer completeness (PTC) with respect to the line edge roughness (LER), this paper proposes an advanced method which statistically quantifies the deviations of printed patterns from their corresponding designed patterns. Asymmetric patterns of Archimedean, logarithmic, and hyperbolic spirals are demonstrated using inkjet printing under various conditions to show different LERs and the effectiveness of the advanced method. The advanced method analyzes patterns using parametric forms in Cartesian coordinates with negligible evaluation errors which outperform existing methods. This study involved comprehensive analyses of the impacts of digitized images, the detection range, and its movement. The results show that the proposed method not only correctly reflected the PTC, but also exhibited operational flexibilities, e.g. the evaluation efficiency may be enhanced by introducing an enlarged detection range or an increased movement of the detection range.
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