Study of Coating Technology on Laser Mirrors

• Main Authors: Lin, Cho-Wei, 林卓威
• Other Authors: Wang, Pei-Jen
• Format: Others
• Language: zh-TW
• Published: 2019
• Online Access: http://ndltd.ncl.edu.tw/handle/2pyu4t

碩士 === 國立清華大學 === 動力機械工程學系 === 107 === Nowadays, laser technology has been applied to many applications in industrial manufacture processes, such as welding, cutting, and drilling. To improve the processing speed and precision, laser galvanometer scanning system, generally based on two galvo mirrors, can control the laser beam aiming at work objects. Hence, it is important to increase the reflectivity of the galvo mirrors via the surface coatings for reduction in energy losses in the scanning system. In this thesis, the design of coatings on galvo mirrors employs Essential Macleod, a thin film design software copyrighted by Thin Film Center Inc. This design use Silicon dioxide(SiO2) and Trititanium pentoxide(Ti3O5) as materials, and with the function of optimization in the software, the reflectivity of galvo mirrors could approach 99% in 500~550nm. Next, an in-house vacuum coater, Made by Showa Zenko Co., conducts the coating process of galvo mirrors based on the design parameters. And, a spectrometer measures the reflectivity of coated galvo mirrors to give assessment of coating processes in order to make the design of coating parameters fulfill the specifications of the mirrors.