Fabrication of SO2 gas sensor with thin film suspension structure

碩士 === 國立高雄科技大學 === 機械工程系 === 107 === With the increasing air pollution, people began to pay more attention to the verification of air quality, and the demand for related sensors for gas detection has gradually increased. The main goal of this research is to develop a sensor for measuring SO2, which...

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Bibliographic Details
Main Authors: WEI,CHIA-TE, 魏嘉德
Other Authors: CHENG,TSUNG-CHIEH
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/9dgnhw