| Summary: | 碩士 === 國立高雄科技大學 === 機械工程系 === 107 === In this study, a metal oxide semiconductor sensing film was prepared by a sol-gel method and an electrospinning method, and was fabricated into a component using a finger-forked gold electrode substrate for use in a gas sensor. The first part uses the electrospinning method to prepare the one-dimensional nanofiber spinning structure. The spinning controller controls the various process parameters to further reach the nanometer scale. The collected ZnO raw textile fibers are collected and forged. After the polymer is removed, the polymer is formed into a polycrystalline structure to form a sensing film and gas sensing is performed on different target gases. At a working temperature of 200 ° C, the sensing film material has a good response to hydrogen sulfide and has a good response. Reproducibility and recovery, also has a good resolution for concentration The second part uses the electrospinning method to make metal oxide semiconductor composites through different concentrations of copper chloride doping, find the optimal concentration ratio of the doping, form the ZnO-CuO heterostructure, and explore the effects of different calcination temperature on the material. It was found that the reaction with hydrogen sulfide had a higher enhancement effect after the 1:0.15 ratio, and had a response value of 83.98% at 200 °C, which was about 25% higher than that before the doping..
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