| Summary: | 碩士 === 國立高雄科技大學 === 機械工程系 === 107 === Organic solvents (such as developer and cleaner) are used in semiconductor packaging process. Volatile organic compounds (VOCs) are produced from tail gas. The original treatment of VOCs with low flow and low concentration in Factory A was by series scrubbing tower with condenser. Due to the change of production line process and in crease of demand, the existing air pollution equipment could not meet the regulation (<0.6kg/hr) .This study proposed short-term improvement plants, and discussed the operation cost for adjusting operation parameters of zeolite runner.
In view of the large flow and high concentration VOCs, the short-term improvement plan of the Factory A are to strengthen, the treatment efficiency of condenser. In the medium and long term, desorption condenser is connected in series with zeolite runner. After running in Factory A, regulation has been complied in . This study further explores, the operation of runner speed and heart compensation of heater. The original average consumption of zeolite runner heater is 2118 kw/day, the annual electricity cost are 1,927,380 yuan, and the speed are raised from 45Hz to 50.5Hz.The average number of heaters was reduced to 1905 kw/day, Which save 213 KW/day, total annual electricity saving cost are 194,000,Which met the regulations and standards.
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