Discussion of operating cost and by-products on VOCs treatment in optoelectronic industries exhaust
碩士 === 國立高雄科技大學 === 機械工程系 === 107 === Organic solvents (such as developer and cleaner) are used in semiconductor packaging process. Volatile organic compounds (VOCs) are produced from tail gas. The original treatment of VOCs with low flow and low concentration in Factory A was by series scrubbing to...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/373v2m |