Preparation of chromium nitride thin films using atmospheric pressure plasma process

碩士 === 國立高雄科技大學 === 化學工程與材料工程系 === 107

Bibliographic Details
Main Authors:	YANG. WEI-HSUN, 楊偉勛
Other Authors:	Hong-Ying Chen
Format:	Others
Language:	zh-TW
Published:	2019
Online Access:	http://ndltd.ncl.edu.tw/handle/9k3b43

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spelling	ndltd-TW-107NKUS00630512019-11-30T17:21:54Z http://ndltd.ncl.edu.tw/handle/9k3b43 Preparation of chromium nitride thin films using atmospheric pressure plasma process 以常壓電漿製程製備氮化鉻薄膜 YANG. WEI-HSUN 楊偉勛碩士國立高雄科技大學化學工程與材料工程系 107 Hong-Ying Chen 陳弘穎 2019 學位論文 ; thesis 141 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立高雄科技大學 === 化學工程與材料工程系 === 107
author2	Hong-Ying Chen
author_facet	Hong-Ying Chen YANG. WEI-HSUN 楊偉勛
author	YANG. WEI-HSUN 楊偉勛
spellingShingle	YANG. WEI-HSUN 楊偉勛 Preparation of chromium nitride thin films using atmospheric pressure plasma process
author_sort	YANG. WEI-HSUN
title	Preparation of chromium nitride thin films using atmospheric pressure plasma process
title_short	Preparation of chromium nitride thin films using atmospheric pressure plasma process
title_full	Preparation of chromium nitride thin films using atmospheric pressure plasma process
title_fullStr	Preparation of chromium nitride thin films using atmospheric pressure plasma process
title_full_unstemmed	Preparation of chromium nitride thin films using atmospheric pressure plasma process
title_sort	preparation of chromium nitride thin films using atmospheric pressure plasma process
publishDate	2019
url	http://ndltd.ncl.edu.tw/handle/9k3b43
work_keys_str_mv	AT yangweihsun preparationofchromiumnitridethinfilmsusingatmosphericpressureplasmaprocess AT yángwěixūn preparationofchromiumnitridethinfilmsusingatmosphericpressureplasmaprocess AT yangweihsun yǐchángyādiànjiāngzhìchéngzhìbèidànhuàluòbáomó AT yángwěixūn yǐchángyādiànjiāngzhìchéngzhìbèidànhuàluòbáomó
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Preparation of chromium nitride thin films using atmospheric pressure plasma process

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