Comparison of Two Types of RTO for the Removal of VOCs from Semiconductor Industry
碩士 === 國立中央大學 === 環境工程研究所 === 107 === This research aims to analyze from the operating data of regenerative thermal oxidizer (RTO) combined with zeolite rotor located in two semiconductor plants. Removal efficiency, auxiliary fuel usage and operating cost between rotary-type regenerative thermal oxi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/w77j6v |