Point diffraction interferometer applied to lens aberration measurement

• Main Authors: Yen-Nung Cheng, 鄭彥農
• Other Authors: Ju-Yi Lee
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/4bnk59

碩士 === 國立中央大學 === 機械工程學系 === 107 === The purpose of the thesis is to measure the aberration in the wavefront phase information of the optical test. This experiment uses the point diffraction interferometry method and solves the wavefront caused by the optical test by the four-step phase-shifting system. The phase distribution is further analyzed by the Zernike polynomial to analyze the aberrations of the wavefront phase. In this experiment, the optical path used is a common-path system and the experimental structure is relatively simple; the diffracted light with the same homology is generated by the grating, and the optical paths of the diffracted light used are similar, so that it is convenient to set up the optical test. For the detection of the aberration of the object to be tested, preliminary detection can be performed. The experimental results show that the system error percentage is within 3 percentage points, and the standard deviation is 0.002852. This thesis also discusses the measurement error, which is environmental error and system error. For the systematic error of the experiment, in the experimental step of analyzing the wavefront phase of the optical test, the error caused by the displacement amount required for the phase unwrapping is not satisfied by the phase shift, and the introduced light enters the error caused by the optical axis of the experimental system and the optical axis of the optical test are not completely aligned. The price of the components used in the system architecture of this experiment can reduce the cost of constructing an optical interferometer compared to optical interferometers currently on the market. It can be regarded as a set of measurement technology with potential for development in measuring the aberration of the optics.