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碩士 === 國立中央大學 === 化學工程與材料工程學系 === 107 === In this study, we based on the nanosphere lithography and one-step Au-assisted chemical etching process to fabricate single-sidde and double-sided vertically-aligned Si nanocone arrays on p-type (001) Si substrates. In order to enhance the near-infrared abso...
Main Authors: | Yi-Ching Chen, 陳宜慶 |
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Other Authors: | 鄭紹良 |
Format: | Others |
Language: | zh-TW |
Published: |
2019
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Online Access: | http://ndltd.ncl.edu.tw/handle/f3c2x7 |