Carbon Monoxide Gas Sensor Based on IGZO film Fabricated Atmospheric Pressure Plasma by Two-Step Annealing
碩士 === 國立交通大學 === 國際半導體產業學院 === 107 === Indium gallium zinc oxide (IGZO) is one kind of transparent n-type metal oxide semiconductor material which is often utilized to the channel layer of thin-film transistors (TFT). IGZO is very sensitive to oxygen in air. Since the sensing mechanism of semicondu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/xueq62 |