ArF excimer laser bandwidth control and improvement

ArF excimer laser bandwidth control and improvement

碩士 === 國立交通大學 === 工學院半導體材料與製程設備學程 === 107

Bibliographic Details
Main Authors:	Cheng, Nai-Yuan, 鄭乃元
Other Authors:	Ko, Fu-Hsiang
Format:	Others
Language:	zh-TW
Published:	2019
Online Access:	http://ndltd.ncl.edu.tw/handle/bne94a

Similar Items

The Study of Controlling ArF Excimer Laser
by: 鄭東明
Published: (2009)

Micro Patterning of PANI(polyaniline) using ArF Excimer Laser
by: 歐明鑫
Published: (2003)

ArF excimer laser micromachining of SU-8 and PMMA resist
by: 陳信傑
Published: (2003)

Fabrication of Silver Nanostructure Using ArF-excimer-laser Photoreduction of Silver Nitrate
by: Chih-Kant Chen, et al.
Published: (2009)

ArF-excimer laser as a potential tool for manufacturing of biomedical polymeric devices
by: B. Stepak, et al.
Published: (2021-08-01)

ArF Excimer Laser Photoablation and contact-mask micro patterning of AZ4620 photoresist
by: 呂俊毅
Published: (2004)

Development of Argon fluoride (ArF) excimer laser ablation system and its diagnosis on optical materials
by: Mohd. Salleh, Mohd. Hazimin
Published: (2004)

Photochemical Micro-/Nano-Swelling of Silicone Rubber Induced by Long Pulse-Repetition Interval of an ArF Excimer Laser
by: Masayuki Okoshi
Published: (2021-05-01)

Fabrication of Superhydrophobic Silicone Rubber with Periodic Micro/Nano-Suction Cup Structure by ArF Excimer Laser-Induced Photodissociation
by: Masayuki Okoshi
Published: (2019-06-01)

Interaction of ArF laser with dental hard tissue (AEM Study)
by: Abbas Majdabadi, et al.
Published: (2016-07-01)

Highly sensitive elemental analysis of ArF laser excited atomic fluorescence of laser plumes
by: Ho, Sut Kam
Published: (2007)

Surface Morphology and Recrystallization Behaviour of Poly-Si after ArF Laser Irradiation
by: Chang Chih-Yu, et al.
Published: (2005)

Demonstration of ACO-Based Freeform Source for ArF Laser Immersion Lithography System
by: Frederick Lie, et al.
Published: (2017-01-01)

Role of a 193 nm ArF Excimer Laser in Laser-Assisted Plasma-Enhanced Chemical Vapor Deposition of SiN<i><sub>x</sub></i> for Low Temperature Thin Film Encapsulation
by: Kunsik An, et al.
Published: (2020-01-01)

Location Control of Grains in Excimer Laser Crystalline of Silicon Thin Films
by: Dun-Yuan Ke, et al.
Published: (2006)

Transputer control of excimer lasers
by: Richardson, Michael Brian
Published: (1994)

Minimally destructive and multi-element analysis of stainless steel by ArF laser-induced plume emissions
by: Lau, Sai Kin
Published: (2013)

Formation of ArF from LPdAr(F): Catalytic Conversion of Aryl Triflates to Aryl Fluorides
by: Watson, Donald A., et al.
Published: (2013)

Mitomicina C e "Excimer laser" Mitomycin C and Excimer Laser
by: Anelise Dutra Wallau, et al.
Published: (2005-12-01)

Influence of KrF Excimer Laser Annealing on the Performance of InGaZnO Thin-Film Transistors
by: Chien-YuanLu, et al.
Published: (2013)

THE INACTIVATION OF HELMINTH EGGS WITH THE NARROW BANDWIDTH RADIATION OF EXCIMER LAMPS
by: E. I. Lipatov, et al.
Published: (2016-05-01)

THE INACTIVATION OF HELMINTH EGGS WITH THE NARROW-BANDWIDTH RADIATION OF EXCIMER LAMPS
by: E. I. Lipatov, et al.
Published: (2016-05-01)

KrF Excimer Laser on the Polyimide Surface Reaction Mechanism
by: Lin, Chih-Long, et al.
Published: (2013)

Study of Semiconductor Lithography Process Defect By ArF Photo Resist
by: Yao Hwan Kao, et al.
Published: (2007)

Application of Soluble Polyimide in KrF Excimer Laser LIGA Process
by: Guang-Yu Huang, et al.
Published: (2000)

Study on photoresist applied in KrF excimer laser LIGA process
by: Wei-Chung Ma, et al.
Published: (1999)

Microusinage de verre photosensible par exposition UV avec un laser excimère ArF (193nm)
by: Dion, Joël
Published: (2008)

Pain control after excimer laser corneal surface ablation
by: Yuan Zeng, et al.
Published: (2014-08-01)

Studies of excimer laser systems
by: Hassan, R. M. R.
Published: (1985)

The characteristics and feasibility of an in-line debris control technique for KrF excimer laser ablative micromachining
by: Dowding, Colin F.
Published: (2009)

The effect of sub-second intervals of ArF laser irradiation on the formation of periodic micro-swelling structures on silicone rubber surfaces
by: Tsuyoshi Yoshida, et al.
Published: (2020-12-01)

Irradiation Study on GaN by 248 nm KrF Excimer Laser
by: Han-Yi Lu, et al.
Published: (2008)

Threshold Damage of Al film by 248 nm KrF Excimer Laser
by: Han-chun Tsao, et al.
Published: (2008)

Fabricated microlens by using an excimer laser
by: Y. C. Kuo, et al.
Published: (2000)

Influence of Excimer laser illumination on micromachining
by: Chun-Wei Shu, et al.
Published: (2004)

Excimer Laser Ablation and Microdrilling of Polymers
by: Che-Chang Hu, et al.
Published: (2002)

Current review of Excimer laser Trabeculostomy
by: Georges M. Durr, et al.
Published: (2020-05-01)

Diplopia monocular pós excimer laser
by: Cristiane S. Neves, et al.

Modeling and Diagnosis of Excimer Laser Ablation
by: Setia, Ronald
Published: (2006)

The development of excimer laser corneal surgery
by: Gartry, David Stanley
Published: (1996)