Application of Trace Element Analyses by Inductively Coupled Plasma Mass Spectrometer

• Main Authors: Lu, Chien-Wei, 呂健瑋
• Other Authors: Wu, Shu-Pao
• Format: Others
• Language: zh-TW
• Published: 2019
• Online Access: http://ndltd.ncl.edu.tw/handle/95p57y

博士 === 國立交通大學 === 應用化學系碩博士班 === 107 === Inductively coupled plasma mass spectrometer (ICP-MS) coupled with variety pretreatments and introduction systems for the trace elements analysis was utilized in the different applications in this study. The first part, ICP-MS was applied to analyze the metal ion impurity in the tetraethyl orthosilicate (TEOS) which is used for semiconductor manufacturing. With a simple liquid-liquid extraction approach, the metal ion in TEOS was transfered into water by adding an assisting agent and was quantified by ICP-MS with concentration effort. Such a method could be used to routine quality control and further extended to analyze other organic materials with trace metal ion impurity. In the second part, a gas sampling system, consists of two impingers and porous tubes, was developed to collect the trace metal ion in nitrogen, hydrogen, helium and hydrogen chloride gases into the specific absorption solution. Then the metal ion in these gases can be quantified by ICP-MS. In the third part, the ICP-MS coupled with the organic introduction system method was used to quantify the concentrations of metal ion impurities in in-plane-switching (IPS) type polyimide (PI) alignment solution. This method can be used not only for routine and large-scale sample analyses but also for studying contamination phenomena during the PI patterning process and for determining the leaching rates of trace metals from bottles. Finally, we developed an ICP-MS method to directly analyze the total sulfur content in petroleum fuel samples.With simple dilution approach of various organic solvent system in specific dilution factor, gasoline and diesel samples were able to have an accurate sulfur concentration by external calibration way. The accuracy of the developed method was evaluated by examining fourteen international proficiency testing samples containing gasoline, ethanol-blended gasoline, diesel and biodiesel obtained from the American Society for Testing and Materials and the Institute for Interlaboratory Studies. The described method is suitable for routine analysis of total sulfur content in petroleum fuels with the combination of an automatic injection system.