| Summary: | 碩士 === 國立交通大學 === 機械工程系所 === 107 === A flexible micro gas sensor integrating of micro-heater and sensor was developed and fabricated in this study. The study proposes a design and fabrication technology of multi-layer thin film for producing the micro gas sensor device composes of both the silver nanowires and graphene thin films and the Polyethylene terephthalate (PET) as the flexible substrate. The flexible micro gas sensor is the device with the characteristics of flexible, portable, temperature controllable, specified gas detectable.
Although the silver nanowires conductive film has great conductivity, it does not stable. From the SEM detection, the silver nanowires was found disconnected and as confirmed as the same phenomenon appeared in the heating experiment. However, this phenomenon has been improved by stacking the graphene film on it. The composition dual layer thin film has been tested and verified that it can increase not only stability but also conductivity. For designing a micro heater with better heat uniformity and higher temperature characteristics. The ANSYS analysis software was adopted for simulating the heating behavior of the thin film while connecting to the DC power supplier. The better idea of the pattern of the micro heater made with the thin film was finally investigated. In this study , Nanosecond laser direct writing system with advantages of economic was adopted for producing and patterning the micro heater to be one of the key component of the gas sensor device. For coming to a available laser parameters, the fabrication performance was evaluated by using the dual beam focused ion beam system and confocal microscopy.
The gas device is made up of two sides. Sensor layer on the one side is used for gas detection, heater layer in the other side is used for heating and the two conducted films were bonded by UV glue. At last, the sensing device with flexible, portable, temperature controllable, sensor detectable has been develop and successfully demonstrated its performance in the study. The results show that when operating temperature increased, sensor response is also increased. The fabrication and technology of gas sensor integrating with proposed micro-heater and patterned conducted thin film can expected to be adopted in various engineering applications.
|
|---|
