Surface Profiling Measurement and Model Reconstruction of Micro Object using Varifocal System based on Multi-Focus Image Fusion

• Main Authors: Fan, Chen-Liang, 范振亮
• Other Authors: Cheng, Pi-Ying
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/2fc8eb

碩士 === 國立交通大學 === 機械工程系所 === 107 === The purpose of this thesis is to integrate and develop a surface profiling measurement system based on the image processing technique supported by the varifocal microscope system. The method of measuring surface profile based on the image processing technique is called shape from focus or multi-focus image fusion. It can measure the surface profile of sample and can create an image with large depth of field at the same time. If the surface of sample is out of the depth of field, the image of sample will be blurry. If the surface of sample is in the depth of field, the image of sample will be clear and sharp. The focus algorithm can determine the sharpness of image of sample and can help the tunable focus system to select the best focus setting. The multi-focus image fusion method based on focus algorithm is established with the supporting of the varifocal microscope systems in this research. Even in the case of poorly depth of field, our systems are still capable to get the all in-focus image with the multi-focus image fusion method. The proposed non detected micro object measuring system of this research can also achieve the functionality of surface profiling in the microscopy scale. The surface profiling method in this research is passive measurement, it does not cause any physically contact to the sample object. It can prevent the risk of damaging the sample.