Spiral Inductor Embedded Monolithic MEMS and RF Transmitter Design
碩士 === 國立交通大學 === 電子研究所 === 107 === A novel design to combine RF transmitter as well as accelerometer monolithically has been proposed. A 2.4GHz RF transmitter is integrated with a spiral type single axis accelerometer. The inductor is designed as accelerometer and achieved mechanical movable by UMC...
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| Format: | Others |
| Language: | en_US |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/h2wufk |
| Summary: | 碩士 === 國立交通大學 === 電子研究所 === 107 === A novel design to combine RF transmitter as well as accelerometer monolithically has been proposed. A 2.4GHz RF transmitter is integrated with a spiral type single axis accelerometer. The inductor is designed as accelerometer and achieved mechanical movable by UMC 0.18um CMOS-MEMS process. Then the sensing structure was synthesized in two inductor just similar the transformer. In this two port spiral transformer, the secondary inductor is designed to be suspended with MEMS structure to perform as accelerometer. The mutual inductance of the transformer will be changed due to displacement of the proof mass. The magnetic flux variation according to extend force can be sensed by demodulation signal and the measured sensitivity is measured to be 11.8 Hz/g. By using monolithically LC-oscillator as signal source, the measured sensitivity can be improved to be 14955 Hz/g. The demodulate sensitivity after mixer is measured to be 4.2516 Hz/g. The sensed signal can be modulated exactly with the transmitter 2.4 GHz sinusoid wave without any other circuit integrated.
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