Rapid Preparation of Gallium Oxide Particles for Gas Sensor

• Main Authors: Chia-Hsin Ke, 柯佳欣
• Other Authors: 吳秋賢
• Format: Others
• Language: zh-TW
• Published: 2019
• Online Access: http://ndltd.ncl.edu.tw/cgi-bin/gs32/gsweb.cgi/login?o=dnclcdr&s=id=%22107NCHU5759006%22.&searchmode=basic

碩士 === 國立中興大學 === 奈米科學研究所 === 107 === This study will investigate how to rapidly preparation of gallium oxide nanoparticles and their applications in gas sensors. We will use the liquid metal gallium and salt aqueous solution for electrolytic reaction to rapidly produce gallium oxide particles and prepare the film to measure the gas. The characteristics of gallium oxide nanoparticles were observed by X-ray diffraction, Transmission Electron Microscope, and Electron Spectroscopy Chemical Analysis. The X-ray diffraction pattern was consistent with JCPDS. It is found that the applied voltage and the ambient temperature will affect the size of the gallium oxide particles shown in the picture of the transmission electron microscope. The Ga2O3 films were use to sense carbon monoxide gas. The electrical properties of Ga2O3 sensor were measured by the high-resistance meter. The sensitivity was increased with concentration increased. The sensor can detect CO levels ranging from 30–70 ppm. Both resistance change and sensitivity linearly increase with increasing CO concentration. There is a significant response to carbon monoxide, indicating the produced gallium oxide film is a good CO sensor.