Ab initio Study of the Effect of Nitrogen on Diamond Film Growth
碩士 === 國立中興大學 === 精密工程學系所 === 107 === The reaction energy for growing a nitrogen-doped diamond thin film on (100), (110), and (111) orientations by using chemical vapor deposition (CVD) has been studied in this work. The mechanisms involved in CVD include the hydrogen abstruction from diamond surfac...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/cgi-bin/gs32/gsweb.cgi/login?o=dnclcdr&s=id=%22107NCHU5693030%22.&searchmode=basic |