Sputtering Deposition of TaNxOy Thin Films Using Air as a Reactive Gas for Photoelectrochemical Applications
碩士 === 國立中興大學 === 材料科學與工程學系所 === 107 === Tantalum oxynitride (TaNxOy) with tunable properties between tantalum nitride and tantalum oxide could be manipulated by tailored O/N ratio. It can be controlled to different optical properties, mechanical properties, and electrical properties. Therefore, the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/cgi-bin/gs32/gsweb.cgi/login?o=dnclcdr&s=id=%22107NCHU5159067%22.&searchmode=basic |