Microstructure and mechanical properties of (TiZrHf)N/(AlSiB)N multilayer films by reactive magnetron sputtering
碩士 === 國立中興大學 === 材料科學與工程學系所 === 107 === In the research and application of hard film nowadays, the ultra-high hardness is not the only orientation. The different application requirements are considered, and the development of multi-functionality in which the multilayer film can have the characteris...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/cgi-bin/gs32/gsweb.cgi/login?o=dnclcdr&s=id=%22107NCHU5159037%22.&searchmode=basic |