Fabrication of Ga, Mg and F co-doped ZnO thin film by RF magnetron sputtering for Si thin film solar cell application
碩士 === 國立中興大學 === 光電工程研究所 === 107 === In this study, gallium, magnesium and fluorine co-doped ZnO (GMFZO) films were prepared by ratio frequency (RF) magnetron sputtering with ceramics targets on Corning EagleXG glass. The surface morphology, structure, compositional, electrical and optical properti...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/trxq4j |