Effect of Width and Length of ZnO Channel on Field Effect Transistor

碩士 === 大葉大學 === 醫療器材設計與材料碩士學位學程 === 107 === In this experiment, a ZnO film was deposited on a glass substrate (Corning Engle 2000) using a magnetron RF sputtering system with RF output of 100 W at 150 mtorr working pressure. According to the different devices of MESFET and MISFET, the ZnO thin film...

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Bibliographic Details
Main Authors: Liang Zih Wei, 梁秭瑋
Other Authors: Song Huang Huei
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/rau4bq

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