Study on the best Dosing point of semiconductor process exhaust wet scrubbers
碩士 === 中華大學 === 工業管理學系 === 107 === Nowadays semiconductor industry use various of chemical substances in manufacturing processes. Acid, alkaline, other toxic gases all use packed bed wet scrubber to do further disposition in semiconductor processes. Due to deterioration of the environment pollution...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/432y3d |