Study on the best Dosing point of semiconductor process exhaust wet scrubbers

• Main Authors: LIN, YI - AN, 林益安
• Other Authors: MA,HENG
• Format: Others
• Language: zh-TW
• Published: 2019
• Online Access: http://ndltd.ncl.edu.tw/handle/432y3d

碩士 === 中華大學 === 工業管理學系 === 107 === Nowadays semiconductor industry use various of chemical substances in manufacturing processes. Acid, alkaline, other toxic gases all use packed bed wet scrubber to do further disposition in semiconductor processes. Due to deterioration of the environment pollution intensificate people's consciousness and pay more attention on environmental protection. Stricter laws and regulations, raised standards of pollution control, up to 10 millions high penalty fine and possible criminal sanction might resulted in factory shutdown cause huge loss. Therefore, how to handle the waste gas of semiconductor processes effectively and improve air pollution control equipment to reach greatest benefit become an important mission and greater challenge. Current built waste gas packed bed wet scrubber can not upgrade equipment or change it's original design to improve its efficiency and operation functions. Therefore, packed bed wet scrubber could mainly rely on regular maintanence to avoid waste gas handling volume variation result in abnormal emissions. Detergent's PH value will affect by exhaust gases from manufacturing processes which need to control waste gases removal rate stability. If the waste gases from semiconductor processes didn't complete exhaust gases treatment and enter ourside environment will cause huge pollution. Detergent's PH value specification also be reviewed and audited by goveronment environmental protection department. If there's any out of specification of the PH value might face penalty fine, even resulted in factory shutdown which affect production line operation. The purpose of this study is to improve detergent's PH value stability control of waste acid gas handling equipment and reduce its operation cost. Use past PH control chemical added points trend chart to find out best added point and use chemical added volume as an variation index to conduct detergent's PH value stability experiment. With the experiment, hope can find out the best chemical added point and approciate added volume to reduce packed bed wet scrubber operation cost.