Study on Mechanical Chemical Grinding of Single Crystal Silicon Carbide
碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 106 === Silicon carbide (SiC) is attracting more and more attention and has great potential to become the next-generation semiconductor material for its wide bandgap, high electric breakdown field, high thermal conductivity, high chemical stability and low intrinsic...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/z7877b |