Analysis of Taiwan Semiconductor Factorys Energy Consumption and Renewable Energy Support

• Main Authors: CHAN, CHIEN-CHIEN, 詹前建
• Other Authors: 胡石政
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/3v8p9w

碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系 === 106 === In recent years, non-nuclear policies have increased both domestic energy shortages and air pollution. According to the Energy Bureaus data, electronics industry electricity consumption reached 18.35% of the country’s consumption in 2016. In the past five years, TSMC contributed with 33.6% of the overall consumption. CommonWealth magazine published an article which refers to the estimated power consumption of the new TSMCs 5 nm process plant that will require 720 MW of electricity. The main purpose of this study is to reach 720 MW as an energy-saving goal. For that reason, this study uses a High-Tech facility (fab) real case data in order to analyze an energy-saving simulation of the factory system using the developed High-Tech Facilities Energy analysis Software (FES) and ECF calculator. Some changes can be applied to reduce the electricity consumption, they are: Increase centrifugal chiller water temperature and fixed-frequency replaced by the variable frequency centrifugal chiller, decrease the air supply temperature of MAU, common lights are replaced by an inductive LED, decrease FFU wind speed and CDA system can be changed to a dual supply pressure and a heating dryer. The combination of the five cases simulation analysis mentioned above could save 9.04% of the total consumption. According to David J.C. MacKays renewable energy calculations, available areas with an extension of 100 km2, 100 km2, and 18 km2 can contribute with solar energy, onshore wind energy and off shore wind energy respectively and they combined and implemented will reach the future demand of 720 MW.