Phase-Shifting Interference microscope with remote phase module

• Main Authors: Yung-Chieh Chern, 陳泳榤
• Other Authors: Shyh-Tsong Lin
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/22ve4f

碩士 === 國立臺北科技大學 === 光電工程系 === 106 === This study proposes a phase shifting interference microscope with a remote phase modulation module. The experimental equipment comprises a light source module, a remote phase modulation module, a fiber optic module, an interference module, an optical table and a working table. The light source module is a low-coherent light source. Finally, it received by the CCD, and five interferograms are obtained. Then the Matlab performs a five-steps phase shift principle operation to measure the contour and the step height. The interference microscope, together with the design of the structure, is an active anti-disturbance interference microscope, and the maximum range of the sample to be measure can reach about 11μm. In the experiment, the standard height test piece is measured, and the standard deviation of the final experimental result is 1.918 nm. Compared with the Mirau interference microscope system, the experimental system is closer to the ideal value.