The Study of MgxZn1-xO MSM Photodetector with Different Mg content by RF Magnetron Sputter
碩士 === 南臺科技大學 === 電子工程系 === 106 === In this study, the MgZnO thin films with various Mg contents were deposited on the quartz substrate by RF magnetron sputtering. The electrical and optical properties of the metal-semicoductor-metal ultraviolet (UV) photodetectors by different annealing treatments...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/qe94m3 |