Analysis of Flat Surface Nanograting Guided- Mode Resonance Sensors

• Main Authors: KUO, SHENG-FENG, 郭勝豐
• Other Authors: KUO, WEN-KAI
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/y3295y

碩士 === 國立虎尾科技大學 === 光電工程系光電與材料科技碩士班 === 106 === This study proposes the use of nanoimprinting process to fabricate a flat guided-mode resonant biological sensing device. We compare two types of one-dimensional grating guided mode resonant devices. One is a traditional guided-mode resonant device structure with the grating pattern waveguide on surface. The other device has smooth surface, and the excitation light is launched into the substrate side. The flat surface guided-mode resonance device can prevent non-homogeneous attachment of biological specimens or cell which may occur on the non-flat grating surface. However, based on the simulation results, the sensitivity of the flat surface guided-mode resonance sensing device is 10⁰/ RIU. To improve the sensitivity, we propose to use a low refractive index layer in the flat surface guided-mode resonant device structure to enable electric-field distribution under resonance condition be more concentrated on the sensing surface. Simulation results show that the sensitivity of this kind device can be increased to 20⁰/RIU.