Development of Silicon Nanomembrane Epitaxial Lift-off Processes by Supercritical Fluids Technology
碩士 === 國立高雄大學 === 電機工程學系碩博士班 === 106 === Nowadays, to match electronics products needs, which stable and reproducible processes for obtaining thin films to fabricate flexible devices are going to become more and more significant. As known, monocrystalline silicon (c-Si) has better electrical perform...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/872mzs |