Compound Speckle Interferometer for Multi-Degree-of-Freedom Measurement
碩士 === 國立臺灣科技大學 === 機械工程系 === 106 === In this study, a compound speckle interferometer for multi-degree-of-freedom measurement is proposed. By combining heterodyne interferometry, speckle interferometry and beam splitting techniques, the system can perform precision displacement and rotation measure...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2018
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/t9wxgg |