Fabrication of CrCx/a-C:H thin films through the high power impulse magnetron sputtering
碩士 === 國立臺灣科技大學 === 機械工程系 === 106 === The potential use of chromium carbide films has been a great interest to academia and industry owing to their outstanding properties such as chemical stability, low coefficient of friction, and high wear resistance. For instance, they can be applied on high-spee...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/ybjs98 |