| Summary: | 碩士 === 國立臺灣大學 === 機械工程學研究所 === 106 === In recent years, triboelectric energy harvesting devices have become very popular research topic and have many applications in different research fields. The main goal of this dissertation is to fabricate micro-nanostructures on the surface of the metal layer and triboelectric layer (Polydimethylsiloxane, PDMS) of the triboelectric energy harvesting device. At the same scale, compare the voltage and current output of the triboelectric energy harvesting device with or without the metal layer micro-nanostructure.
By using photolithography, dry etching and wet etching techniques, a pyramid groove array substrate can be fabricated and used as a template for PDMS replica-modeling process. Through the PDMS mold transformation, a pyramid array structure can be formed on the PDMS surface, which can be placed on the lower electrode as a triboelectric layer. On the other hand, this dissertation use electron beam evaporation to deposit silver (Ag) on the silicon substrate as the upper and lower electrodes, and using dry etching technique to fabricate the lower electrode. After the square columnar micro-nanostructure is assembled, a triboelectric energy harvester (TEH) is fabricated.
In this dissertation, three kinds of base length of pyramid arrays are fabricated in the triboelectric layer: 10μm, 15μm, and 20μm, and the pitch of the pyramids is the same as the length of the bottom side, while the lengths of the square columns of the lower electrode also are: 10μm, 15μm, 20μm, and the pitch is the same as the side length. When the unsaturated pressure is given, the open-circuit voltage and short-circuit current of the triboelectric energy harvester with micro-nanostructure metal layer are better than those without micro-nanostructure. The smaller the base length of the structure, the larger contact area triboelectric energy harvester will have, and large contact area lead to a better output performance. This result is consistent with the trend of the mathematical model. Therefore, the performance of the triboelectric energy harvester can be further improved by fabricating the micro-nanostructure on the metal layer.
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