Effect of Temperature and Energy per Atom (E/n) in Ar Gas Cluster Ion Beam (GCIB, Arn+) on Depth Profile of Organic Thin Film by Secondary Ion Mass Spectroscopy
碩士 === 國立臺灣大學 === 材料科學與工程學研究所 === 106 === Secondary Ion Mass Spectroscopy (SIMS), with its ability to analyze chemical compositions at near surface and along the depth, has been used for decades. However, depth profiles of bio-materials and soft materials are more difficult to obtain due to the frag...
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| Format: | Others |
| Language: | zh-TW |
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2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/752re9 |