A Study of Automatic Optical Inspection for Interfacial Stress of Flexible Multi-Layer Substrate

• Main Authors: Huang, Shih-An, 黃仕安
• Other Authors: Wen, Bor-Jiunn
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/ub3jpp

碩士 === 國立臺灣海洋大學 === 機械與機電工程學系 === 106 === The purpose of this study is to use the relationship between stress and optical interference to detect the interfacial stress and residual interfacial stress of flexible conductive substrates. Polyethylene terephthalate (PET) / indium tin oxide (ITO) composite material (composite material) is used as a double-layer flexible conductive substrate in this study. Polarized light passes through the substrates and a tensile stress is applied to the sample simultaneously. The light is divided into two types of light, which are faster and slower, when the polarized light passes through the substrate. The speed difference between two interference stripes, and the relative distance is called phase retardation. This study utilizes the stress-optical coefficients of different ITO thicknesses of flexible conductive substrates to investigate the relationship among theoretical, simulated, and experimental interfacial stress at the same tensile force situation. Moreover, three layers of silicon dioxide and silicon nitride are used as the water-resistant layer and gas-resistant layer deposited on polyimide (PI) to be a seven-layer flexible substrate. As a result, the simplified method of obtaining a single stress-optical coefficient of the multi-layer flexible conductive substrate is established. Finally, the nonlinear characteristics of the film thickness and stress-optical coefficient are obtained. Therefore, the interfacial stress of each layer of the flexible substrate is successfully obtained by the theoretical, simulated, and experimental methods in this study.