Fabricated Process of Surface and Interior Microstructure on Optical Glass by Using Nano-second Laser Pulses

• Main Authors: Chao, Kang, 趙綱
• Other Authors: Yu, Hsing-Cheng
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/9zzxvh

碩士 === 國立臺灣海洋大學 === 系統工程暨造船學系 === 106 === Recently, development of fabricated process methods for optical grating, microfluidic devices, and internal microstructure on glasses can apply to several fields, especially in a large number of application on biochip fabrication. The biochips can be made by silicon wafers, polymeric materials, and glasses, and the glasses become suitable manufacturing materials in the biochips because they have better properties in optics and chemistry. This study presented fabricated mechanism of optical glass by using ultra-violet nano-second laser pulses and explored experimental results. Soda-lime glasses and Schott B270 were chosen to be experimental materials. The laser spots were focused on/inside the glasses to fabricate surface structure and interior microstructure by a telephoto objective, and the effect of structural morphology and ablation volume were investigated by varied laser parameters. In experimental results, the Schott B270 has larger surface ablation volume than the soda-lime glasses in the same laser process parameters; moreover, the soda-lime glasses have larger interior microstructure than the Schott B270. Fabricated micro-cracks can be healed by heat accumulation in the process zone if the number of laser pulse increases; additionally, structural dimension can be increased by heat accumulation in the process zone if the laser frequency increases. Finally, a predictive method of ablation mass was presented by using input heat calculation of the nano-second laser. The ablation mass range was estimated about 0.1~0.9 ug in experimental conditions: 200 laser pulses, laser fluence is 25~50 uJ, and laser frequency is 60~120 kHz. The results can be applied to fabricate glass biochips and microstructure; simultaneously, the relationship between fabricated process parameters and interior microstructure by using nano-second laser pulses can apply to manufacturing applications of waveguide and optical grating.