| Summary: | 碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 106 === This research proposed a stretchable large-area tactile sensor that can be used as a robot skin in robotic systems. The merit of this device: 1. Low powder weight fraction that solved fragile problem. 2. Electrical resistance anisotropy property, which can generate tactile image. 3. Sensitivity improved by utilizing MR effect. 4. The fabrication problem due to the high powder weight fraction can be solved.
In this study, while maintaining the advantages of batch fabrication process of MEMS technology, combined with the traditional machining method, the proposed device have the following features: 1. Symmetrical structure design, and the conductive electrodes embedded in the sensing film, close to the material Neutral axis, that can reduce the strain value of electrodes. The outermost layer of the PDMS has the advantages: 1. Due to the homogeneous property of the PDMS, the two layers of PDMS have no obvious interface. 2. Protecting the conductive electrodes from damage.
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