Laser Interference Lithography System Design and Development

Laser Interference Lithography System Design and Development

碩士 === 國立清華大學 === 動力機械工程學系 === 106

Bibliographic Details
Main Authors:	Dzeng, Yu-Hua, 曾郁樺
Other Authors:	Fu, Chien-Chung
Format:	Others
Language:	zh-TW
Published:	2018
Online Access:	http://ndltd.ncl.edu.tw/handle/95uppr

Similar Items

The Development and Optimization of the Multi-Beam Laser Interference Lithography System
by: Lin, Te-Hsun, et al.
Published: (2018)

Design and development of real-time light shape monitor system of laser interference lithography
by: 楊音光
Published: (2014)

Design of novel interference lithography systems
by: Wei-Hung Wu, et al.
Published: (2016)

The Fabrication of Nanostructures on Polydimethylsiloxane by Laser Interference Lithography
by: Jun Wu, et al.
Published: (2019-01-01)

Application of Laser Beam Shaping Device on Large Area Laser Interference Lithography System
by: Wu, Yu Hsiang, et al.
Published: (2015)

Laser interference lithography and its application to fabricate phase mask
by: Yu-ChuLin, et al.
Published: (2011)

Direct laser interference lithography in periodical treatment of biomaterials
by: Krzysztof Czyż, et al.
Published: (2016-12-01)

Development of the Laser Interference Lithography Equipment and the Applications of the Fabricated Periodic Nano Structures
by: Chang, En-Chiang, et al.
Published: (2014)

Fabrication Of Periodical Nanostructures On CIGS Thin Film By Laser Interference Lithography
by: Yu, Hsuanyu, et al.
Published: (2012)

The Design of a Compact Laser Interference Lithography System for the Fabrication of Large Area Nano-Imprint Mold
by: Chih-Hsiang Yang, et al.
Published: (2008)

Fabrication of Nanostructures on Solar Cells by Two-beam Laser Interference Lithography
by: Lu, Hsinwei, et al.
Published: (2011)

Large-Area Printed Broadband Membrane Reflectors by Laser Interference Lithography
by: Jung-Hun Seo, et al.
Published: (2013-01-01)

Low-cost interference lithography
by: Fucetola, Corey P., et al.
Published: (2012)

Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography
by: Tianxu Jia, et al.
Published: (2021-01-01)

Mirror-tunable Laser Interference Lithography Systemfor Wafer-Scale Patterning with Flexible Periodicity
by: Yu-nung Lin, et al.
Published: (2015)

Throughput Comparison of Multi-Exposure and Multi-Beam Laser Interference Lithography (LIL) on Nano Patterned Sapphire Substrate Process and Design of Optimized Lithography Apparatus
by: 黃則斌
Published: (2013)

Development of a simple, compact, low-cost interference lithography system
by: Korre, Hasan, et al.
Published: (2012)

Study of Achromatic Interference Lithography Technology Used in Large-Area Lithography
by: Wang, Yun Wen, et al.
Published: (2015)

Nanodisk and Nanohole Array Based Nanoplasmonic Sensor Fabricated by Laser Interference Lithography
by: Chi-Chen Lin, et al.
Published: (2018)

Label-free plasmonic detection using nanogratings fabricated by laser interference lithography
by: Hong, Koh Yiin
Published: (2017)

Interference lithography with extreme ultraviolet light
by: Kim, Hyunsu
Published: (2016)

Application of a UV Single Mode Fiber as Spatial Filter for a Laser Interference Lithography System
by: Sun, Yi-Lin, et al.
Published: (2011)

Development of Blue Laser Direct-Write Lithography System
by: Hao-Wen Chang
Published: (2012-01-01)

Development of Blue Laser Direct-Write Lithography System
by: Hao-Wen Chang, et al.
Published: (2012-01-01)

Analysis and Cancellation method of Laser interference lithography Vibration defects caused by environment Vibration
by: Mai, Hsuan-Ying, et al.
Published: (2017)

Fabrication of Micron and Submicron Compound Structures by Combining Interference Lithography and Nanoimprint Lithography
by: Hsin-Chieh Chiu, et al.
Published: (2009)

Design and Analysis of Semiconductor Laser Direct Writing of Lithography System
by: Liang-Hsiu Chu, et al.
Published: (2018)

Development of Blue Ray Laser Direct-Write Lithography System
by: Hao-Wen Chang, et al.
Published: (2011)

Strategic analysis of innovative laser interference lithography technology using claim-based patent informatics
by: Chia-Wei Jui, et al.
Published: (2016-12-01)

Modeling of multiple-optical-axis pattern-integrated interference lithography systems
by: Sedivy, Donald E.
Published: (2014)

Fabrication and Optical Characterization of Silicon Nanostructure Arrays by Laser Interference Lithography and Metal-Assisted Chemical Etching
by: P. Heydari, et al.
Published: (2014-10-01)

Toward nano-accuracy in scanning beam interference lithography
by: Montoya, Juan, 1976-
Published: (2007)

Nanostructuring magnetic thin films using interference lithography
by: Walsh, Michael E. (Michael Edward), 1975-
Published: (2005)

PARALLEL FABRICATION OF PHOTONIC CRYSTALS USING INTERFERENCE LITHOGRAPHY
by: CHINCHOLI, ASHWIN
Published: (2005)

Contrast Analysis of Polarization in Three-Beam Interference Lithography
by: Fuping Peng, et al.
Published: (2021-05-01)

Fabrication and Application of Binary Phase Grating on a Fiber End by Utilizing Interference Lithography
by: Ching-Tung Tseng, et al.
Published: (2011)

Design and analysis of a scanning beam interference lithography system for patterning gratings with nanometer-level distortions
by: Konkola, Paul Thomas, 1973-
Published: (2005)

Fabrication of Phase Masks by Immersion Interference Lithography and Study of Bottom Antireflective Coating Layers for Optical Lithography
by: Wei-Chung Cheng, et al.
Published: (2004)

Combining Interference Lithography and Two-Photon Lithography for Fabricating Large-Area Photonic Crystal Structures with Controlled Defects
by: Hongsub Jee, et al.
Published: (2021-07-01)

Magnetic properties of permalloy antidot array fabricated by interference lithography
by: A. S. Silva, et al.
Published: (2019-03-01)