Monolithic Integration of CMOS Humidity and Pressure/Temperature Sensor for Environment Sensing Hub
碩士 === 國立清華大學 === 動力機械工程學系 === 106 === This research presents a monolithically integrated environment sensing hub utilizing the TSMC CMOS platform. This study first focuses on the structure design of humidity sensors, with the intention of improving the sensors’ response time and sensitivity, then i...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/6qu56j |