| Summary: | 碩士 === 國立清華大學 === 動力機械工程學系 === 106 === This research presents a monolithically integrated environment sensing hub utilizing the TSMC CMOS platform. This study first focuses on the structure design of humidity sensors, with the intention of improving the sensors’ response time and sensitivity, then in order to fully utilize the CMOS platform, a pressure sensor and a temperature detector are integrated monolithically on the same chip, the core concept of this research is to fabricate all four sensors at once, without the fabrication process inteferring each other.
Experimental measurements will be operated seperately once all the fabrication processes are completed, experiment results show the performance of each device are all above average, proving the feasibility of monolithic integration upon the CMOS platform.
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