Synthesis and Development of Tin Clusters Applied to Extreme Ultraviolet Photoresists

• Main Authors: Wu, Hsin-Yi, 吳新怡
• Other Authors: Liu, Rai-Shung
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/pf6dt5

碩士 === 國立清華大學 === 化學系所 === 106