| Summary: | 碩士 === 國立中山大學 === 材料與光電科學學系研究所 === 106 === The goal of this experiment was to complete Ag-Au-Pd-Al 500℃ isothermal phase diagram in silver rich region. Use the information given by the phase diagram to improve the poorly-characterized IMCs that were prone to occur during silver bonding. Different from the traditional mass production of the specific alloys to complete the phase diagram, this experiment mainly using the hot-pressed diffusion couple method interface phase equilibrium study, and use the phase balance results of specific alloys to assist. To be collated to get the overall phase equilibrium relationship to complete the quaternary system in silver rich region isothermal phase diagram. All the samples in the experiment were prepared by Arc Melting and sealed in the vacuum quartz tube for 500℃ homogenization annealing. The diffusion couples were set for 500oC heat treatment for 72 hours and 168 hours. Divided into two aging time was because the aging time can help the analysis. After the metallographic treatment, the BEI and the composition of each phase were extracted to analyze by the Electron Probe Micro Analyzer (EPMA).
According to the experimental results found four-phase equilibrium below: Ag2Al+PdAl4+Pd8Al21+AuAl2. And speculated that the experimental configuration diffusion path of the diffusion couples were all (Al) | Ag2Al | Ag2Al+PdAl4+AuAl2 | Ag2Al+Pd8Al21+AuAl2 | Ag2Al+AuAl2 | (Ag) | alloy. Based on these results, the specific alloys were placed and subjected to a 30-day homogenization heat treatment at 500°C to confirm and correct the results of the diffusion couples.
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