| Summary: | 碩士 === 國立中央大學 === 光機電工程研究所 === 106 === The purpose of this paper is to improve the traditional pulsed langmuir probe. By data simulation, we studied the influence of the contamination layer on the probe, and develop an algorithm to correct the current measurement accuracy and enhance the anti-noise capability. In order to improve the spatial resolution, this paper attempts to measure the I-V curve with the minimum number of pulses, we find the representative scanning voltage point to calculate the electron temperature and density. Finally, we studied the characteristics of the contamination discharge curve, and develop an algorithm to calculate the capacitance discharge time and optimize the pulse interval time.
|
|---|
