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• Main Authors: Chuan-Han Huang, 黃詮涵
• Other Authors: Shih-Jui Chen
• Format: Others
• Language: en_US
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/cxvh62

碩士 === 國立中央大學 === 機械工程學系 === 106 === Due to the rapid development in microelectromechanical systems (MEMS), the power consumptions of sensors and actuators decrease in a large scale. In order to minimize the size of the devices, we present a micro energy harvester to replace the traditional batteries which have the disadvantage of size in general. In this case, 3-dimensional structure under vibrations causing the electromagnetic induction to generate electricity is selected to be the principle of the energy harvesting. This study proposes a fabrication on the silicon wafer process for the cantilever with multi-layer conductive coils by an automatic dispensing robot stacking above the cantilever. The cantilever is placed on a shaker which contributes a relative displacement with a Neodymium magnet. We compare the performances of 1 to 3 layers of coils on the harvesters. From the experimental results, we found that the single-layer coil harvesters have high output power but narrow bandwidth. On the other hand, multi-layer coil harvesters have lower output power but wider bandwidth.