Manufacturing and Thermal Property Analysis of Porous Silicon Structure by Metal Assisted Chemical Etching
碩士 === 國立中央大學 === 機械工程學系 === 106 === Nanoporous material has been widely used in various applications. It has high area-to-volume ratio that increases surface area and can be used in gas sensors, mass spectrometers, mass-transferring films, and anti-reflection coating on solar panels. Due to the in...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/z9zg43 |