Simulation and Experiment of Aluminum V-beam Micro Thermal Actuators
碩士 === 國立中央大學 === 機械工程學系 === 106 === In micro-electro-mechanical system, micro-thermal actuators have the advantages of low input voltage, large displacement and simple fabrication process. Typical micro-thermal actuators are driven by material expansion. Accord to the actuation direction, it can be...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/5737by |