Selective Deposition of ZnO Nanostructure at Silicon Nanobelt Devices via Localized Joule Heating as Gas Sensors
碩士 === 國立交通大學 === 生醫工程研究所 === 106 === In this thesis, gas sensing behavior of ZnO-functionalized double-junction (n+/n-/n+) polysilicon nanobelt (PNB) device toward oxygen, ammonia and humidity were investigated. The ZnO nanostructures were selectively deposited at the n- region of PNB via device lo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/v47jf9 |