| Summary: | 碩士 === 國立交通大學 === 影像與生醫光電研究所 === 106 === In recent days, graphene has drawn a lot of attention due to its unique and outstanding electrical, mechanical, thermal, and optical properties. Owing to its high electrical conductivity, significant electron mobility, low electrical impedance, and tunable electric conductivity which will be the candidates for electronic and optoelectronic devices. In this thesis, a femtosecond laser induced multiphoton absorption causing localized heating while simultaneously decomposed carbon atoms diffused into the catalytic metal, and Nickel film. During cooling process, the carbon atoms will segregate on the both side of Ni film to form graphene patterns. Then the Ni film can be removed by wet chemical etching processing. Comparing with other methods, no needs of closed chamber or high temperature heating, and graphene patterns can be growth. Finally, we use femtosecond laser direct writing to fabricate graphene Fresnel phase zone plates, and expect it can be utilized in wave front sensor as diffractive microlens array. Therefore, fabricating graphene optical device using ultrafast laser direct writing has been demonstrated which is a more efficient way and promising for the compact optical systems.
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